scanning electron-beam lithography


scanning electron-beam lithography
skleistinė elektronpluoštė litografija statusas T sritis radioelektronika atitikmenys: angl. scanning electron-beam lithography; write electron-beam lithography vok. Elektronenstrahlschreibenlithografie, f; Rasterelektronenstrahlithografie, f rus. сканирующая электронно-лучевая литография, f pranc. lithographie à faisceaux électroniques à balayage, f; lithographie électronique à balayage, f

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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  • write electron-beam lithography — skleistinė elektronpluoštė litografija statusas T sritis radioelektronika atitikmenys: angl. scanning electron beam lithography; write electron beam lithography vok. Elektronenstrahlschreibenlithografie, f; Rasterelektronenstrahlithografie, f rus …   Radioelektronikos terminų žodynas

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